high k metal gate process
由LWu著作·2013—Thechapterfirstexplainsthedetailsofdevicesfabricationprocessandthendescribestheanalysistechniqueusedinthisproject,including ...,ElectrodeandDielectricWhenthegateispulsed,currentflowsbetweenthesourceanddrain.Intel'sHigh-K/MetalGatet...
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High-κdielectricsareusedinsemiconductormanufacturingprocesseswheretheyareusuallyusedtoreplaceasilicondioxidegatedielectricoranother ...
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